JPH0719170Y2 - 半導体放射線検出器 - Google Patents
半導体放射線検出器Info
- Publication number
- JPH0719170Y2 JPH0719170Y2 JP1988140879U JP14087988U JPH0719170Y2 JP H0719170 Y2 JPH0719170 Y2 JP H0719170Y2 JP 1988140879 U JP1988140879 U JP 1988140879U JP 14087988 U JP14087988 U JP 14087988U JP H0719170 Y2 JPH0719170 Y2 JP H0719170Y2
- Authority
- JP
- Japan
- Prior art keywords
- film
- radiation
- vapor deposition
- semiconductor substrate
- gold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000005855 radiation Effects 0.000 title claims description 31
- 239000004065 semiconductor Substances 0.000 title claims description 27
- 239000010408 film Substances 0.000 claims description 43
- 238000007740 vapor deposition Methods 0.000 claims description 23
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 21
- 239000010931 gold Substances 0.000 claims description 21
- 229910052737 gold Inorganic materials 0.000 claims description 21
- 239000000758 substrate Substances 0.000 claims description 19
- 239000010409 thin film Substances 0.000 claims description 15
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
- 229910052782 aluminium Inorganic materials 0.000 claims description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- 230000009471 action Effects 0.000 claims description 5
- 238000001514 detection method Methods 0.000 description 20
- 229920002799 BoPET Polymers 0.000 description 9
- 239000005041 Mylar™ Substances 0.000 description 9
- 230000008021 deposition Effects 0.000 description 5
- 238000005259 measurement Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000002238 attenuated effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004347 surface barrier Methods 0.000 description 2
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 description 1
- 229920000134 Metallised film Polymers 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052744 lithium Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988140879U JPH0719170Y2 (ja) | 1988-10-28 | 1988-10-28 | 半導体放射線検出器 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988140879U JPH0719170Y2 (ja) | 1988-10-28 | 1988-10-28 | 半導体放射線検出器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0262746U JPH0262746U (en]) | 1990-05-10 |
| JPH0719170Y2 true JPH0719170Y2 (ja) | 1995-05-01 |
Family
ID=31405451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988140879U Expired - Lifetime JPH0719170Y2 (ja) | 1988-10-28 | 1988-10-28 | 半導体放射線検出器 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0719170Y2 (en]) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52131485A (en) * | 1976-04-28 | 1977-11-04 | Nippon Toki Kk | Element for measuring quantity of radiation |
| JPS5813033B2 (ja) * | 1977-01-20 | 1983-03-11 | 株式会社東芝 | 半導体放射線検出器 |
-
1988
- 1988-10-28 JP JP1988140879U patent/JPH0719170Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0262746U (en]) | 1990-05-10 |
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